Hello I am currently using PECVD silicon oxynitride to fabricate optical waveguides. However, I am running into a contamination problem when etching the waveguides. I am using chromium as an etch mask, and perfoming the RIE using CF4 and CHF3 in Helium. The black/grey contamination appears around the chromium lines, and EDS has shown it to be mainly carbon-based. Has anyone else run into a similar problem, or knows how to solve this problem? Any help is appreciated! Please send responses to: cmarft@ece.ucdavis.edu ******************************************** Carl Arft Dept. of Electrical and Computer Engineering University of California, Davis Phone: (530) 754-9249 Email: cmarft@ece.ucdavis.edu ********************************************