We are using PMMA as a resist for electron beam lithography on GaAs substrate. A typical size for our structures is several 10nm up several 100nm. PMMA is used with a thickness of about 60nm. Resently we wanted to create more complex structures. Unfortunately the sticking of PMMA is not high enough and therefore the structures became unstable during the development step (due to surface tension and other effects). Does anyone know of a material that increases the sticking of PMMA to GaAs? Thank you for your help! Best regards, Andreas Pecher -- + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + Andreas Pecher Technische Physik Universitaet Wuerzburg Am Hubland 97074 Wuerzburg Germany Tel: ++49-931-888-5173 FAX: ++49-931-888-5143 e-mail:pecher@physik.uni-wuerzburg.de Privat: Schulstr. 13 97297 Waldbuettelbrunn Germany Tel: ++49-931-49971 + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + +