durusmail: mems-talk: Rinse a wafer after using H2O2 and H2SO4
Rinse a wafer after using H2O2 and H2SO4
2003-01-18
2003-01-21
Rinse a wafer after using H2O2 and H2SO4
Kim, GunWoo
2003-01-18
Dear all,
I need your help!
After using a mixed solvent, H2O2 and H2SO4, to remove remained PR
resides on a wafer, how do I rinse the wafer?
Please reply!!
Thanks a lot

Sincerely
Gunwoo Kim

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