The following book would be a good place to start:

Nowick, A. S. and Berry, B. S., Anelastic relaxation in crystalline solids,
Academic, NY, 1972.

Madan.

At 05:15 PM 1/22/2003 +0100, you wrote:
>Dear all,
>
>does anyone know how a deposited film (oxid or metall) influences the
>Q-Factor / damping of torsional resonators. Gas damping is investigated in
>different publications. I did not find much to friction within composite
>beams or a plastic portion within the torsion.
>Any idea or reference is highly appreciated.
>
>Best Regards in Advance
>
>  -------------------------------------------
>Dipl.-Ing. Torsten Kießling
>Fraunhofer Institute
>Photonic Microsystems
>Grenzstr. 28
>D-01109 Dresden
>
>Tel.: +49(0)351/8823-283
>Fax:                -266
>email: torsten.kiesling@ipms.fhg.de
>Internet: http://www.ipms.fhg.de/
>-------------------------------------------
>
>
>_______________________________________________
>MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
>options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>Hosted by the MEMS Exchange, providers of MEMS processing services.
>Visit us at http://www.memsnet.org/

___________________________________________________________

K.V.Madanagopal, Ph.D.
Senior Research Associate
Alliance for Nanomedical Technologies
311 Stocking Hall
Cornell University
Ithaca
NY 14850
Fax:607-255-8741
Phone:607-254-8052
___________________________________________________________