durusmail: mems-talk: edge sharpening of polyimide
edge sharpening of polyimide
1997-06-04
edge sharpening of polyimide
Ying Xu
1997-06-04
Hi, folks,

I am facing the edge shparening problem of negtive polyimide after
exposure. I know there is similar effect in inorganic photoresist due to
the migration of inorganic ions thru the exposed and unexposed area during
exposure. What is the chemical reason for polyimide have the same effect?
Is there a way to reduce it? Overexpose, maybe? Thank you for info.


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