durusmail: mems-talk: Adhesion of parylene to electrodes
Adhesion of parylene to electrodes
Adhesion of parylene to electrodes
kawang@me.rochester.edu
2003-02-03
Hi. We are studying DEP microfluidics at the University of
Rochester. We are working on an experiment to observe the behavior of
water actuated over two nearly parallel vertical electrodes coated with
parylene. However, there have been some problems with the adhesion of
parylene to steel electrodes.

1. We know the roughness of electrodes will affect the adhesion, but we
don't know how smooth we should polish the electrodes, and what steps of
cleaning or drying should be performed.

2. We are ready to try A-174 silane as a adhesion promoter, but we don't
know some treatment details, for example, how long should the electrodes
be kept in the solution, how much time can lapse between applying the
adhesion promoter and the parylene coating treatment.
Does anybody know something about the above questions or other better
methods?

We appreciate your suggestion and help!



reply