durusmail: mems-talk: electrodepositable photoresist
electrodepositable photoresist
2003-02-03
2003-02-04
electrodepositable photoresist
Rahul Agarwal
2003-02-03
Hi,
is any one familiar with the electrodepositable photoresist. Shipley makes
electroplatable photoresist named PEPR 2400. Does any one has any kind of
experience with it. I want to Plate this photoresist in the deep trenches in
silicon wafer.
Any sort of feedback is appreciated.
Thanks
Rahul agarwal
University of South Florida
Electrical Engineering Dept.
Micro Electro Mechanical systems Lab.


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