> Can anyone recommend a general book on etch recipies for RIE, plasma,
and/or
> wet chemical?

For a matrix of the etch rates of 16 materials in 28 etches =

and how the etches work, see
Williams and Muller, "Etch Rates for Micromachining Processing,"
JMEMS, vol. 5, no. 4, Dec. 1996, pp. 256-269.
This also has extensive references.

For a much larger list of etchants, see
Vossen and Kern, "Thin Film Processes,"
Academic Press, NY, 1978, Chapter V-1.

                --Kirt Williams