Hello Yair,

Do you apply an adhesion promoter before the Pyralin deposition?.
Best regards.

Isabel Rivas Guerrero
irivas@ceit.es
CEIT, Microelectronic section
Pº Manuel Lardizabal Nº 15
San Sebastian (Spain)




-----Original Message-----
From: Yair [mailto:syair@t2.technion.ac.il]
Sent: jueves 13 de febrero de 2003 12:58
To: mems-talk@memsnet.org
Subject: [mems-talk] my Pyralin is breaking off


Hello,
I'm using Pyralin 2555 (1:1), ~3um thick, as a dielectric thin film.
After photolitogrphy and development, I want to remove the photoresist
(AZ2020) with Acetone, but the Pyralin is peeling off my substrate as
well (it is not cured yet). Can anyone recommend me something about
that?
Thanks a lot,

Yair Gannot, Process Engineer
Wolfson Microelectronics Research Center
TECHNION - ISRAEL INSTITUTE OF TECHNOLOGY
Technion City, Haifa 3200, Israel
Tel- +972-4-8293291

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