Dear I'm trying to etch Pt layer on a glass wafer. I sputtered Ti and Pt 1000A and 3000A thick respectively on a 4" glass wafer. I patterned with AZ1512 first and then tried to etch the Pt layer with aqua regia( HCl:HNO3=3:1). But I couldn't identify any etching of the Pt. Do I need to heat the aqua regia to etch the Pt layer? If I do not raise the temperature, can't I etch the Pt? Then What is the proper temperature? I hope to get your reply soon... Thank you... Have a nice day~~!! Shin, Young Shik, Master Candidate Micro-BioMechanics Team, Advanced Machine Element Design Laboratory, School of Mechanical & Aerospace Engineering, Seoul National University yungsik@amed.snu.ac.kr youngshik@digital-bio.com