durusmail: mems-talk: tackling MEMS stiction & damp ?
tackling MEMS stiction & damp ?
2003-02-18
indium alloys - deposition and patterning
2003-02-21
2003-02-20
tackling MEMS stiction & damp ?
sou zou
2003-02-18
Hi folks,

The stiction for MEMS due to damp is not a new behaviour. In fact, we are
getting in trouble to move our devices (MUMP's components, but Before we didn't
get this problem). So, we are expecting a high level of damp in the experiment
area in use. My concern is how to tackle this prb immediately (e.g by using a
special spray or stuff like that ?).

Many thanks,

Sofiane



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