Hi Zhiyu: Are you looking for something to cover fully/partially developed PMMA and then develop the rest of the pattern ?Let me know if you get any informaton about this. I am also looking for something on similar lines. Or just developing the exposed and non-exposed PMMA at the same time ? I feel if you are doing this then developing the whole wafer should not be a problem. (Developer being GG Developer) -Madhulika Sathe Need a new email address that people can remember Check out the new EudoraMail at http://www.eudoramail.com