Hallo Jamie,
do you know which is the quality of the vertical
facets after ultrasonic milling the powder blasting?
Do they have an optical quality (i.e.: is that a
technique that can be used for optical guides
manufacturing?)
Thank you.

Michele


-----Original Message-----
From: sp [mailto:sp@formatrix.com]
Sent: giovedì 13 marzo 2003 18.01
To: General MEMS discussion
Subject: Re: [mems-talk] Alternative to wet etching
for glass


Jamie,

You might also try ultrasonic milling for deep etching
in glass. Give us a
call
we provide ultrasonic milling services.

Steve Pence
408-980-9324

----- Original Message -----
From: "Haigh, Richard" 
To: "General MEMS discussion" 
Sent: Thursday, March 13, 2003 6:53 AM
Subject: [mems-talk] Alternative to wet etching for
glass


Jamie

An alternative route to wet etching that you might try
is powder
blasting. This is particularly suited to the abrason
of brittile
materials such as glass. Etch depths of 0.5 to 1 mm
can been achieved. A
Limiting factor is the appature width which is
typically no less than 70
um.

 Regards

Richard
-----Original Message-----
From: Zhimin J Yao [mailto:zyao@rwsc.com]
Sent: 11 March 2003 19:59
To: mems-talk@memsnet.org
Subject: [mems-talk] mask material for wet etch glass

Hi,

We are trying to etch about 0.5 - 1mm deep into glass
or quartz using a
metal mask.  Au did not work well because the adhesion
layer got etched.
Does anybody know what metal works the best?  Anybody
tried W?

Thanks,
Z. Jamie Yao


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