durusmail: mems-talk: perfilometers
perfilometers
perfilometers
Jose Roberto S.Senna
1995-09-19
I need to get information, from a user's point of view, about the capabilities
and limitations of laser perfilometers, like the Chapman 2000 Plus+

The thing looks useful for micromechanics (zero-force profiling) and
measurements of both step heights and smooth profiles, but I have never used
one, or even seen one being used.

Anyone out there has any experience (good or bad) with it ? Or knows someone
else who does ?

Thanks
Jose Roberto Senna
LAS-INPE
C.P. 515
12201-970 Sao Jose dos Campos SP
BRAZIL
ph: + 55 123 256683
fax:+ 55 123 411869
email: jrsenna@las.inpe.br


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