Chapman measured for us some profiles of the microbeams we made with MUMPs. It gave us the details of poly surface. However the reading did not show long-range straightness (>100 microns length). We are not sure if the machine didn't provide long-range flatness or the beams were bent, since we didn't have direct comparision with other measurement. We may try the measurment again with more structures of known profiles in the future. I am replying to public for this, since it may interest many. CJ Kim Assistant Professor UCLA