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mems-talk
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Negative Thermal Expansion Material (liu hai tao)
Plates with thick e-beam resist (Patrick Leech)
RE: 3" 7740 Glass (RAH@moore-solutions.com)
convex corner compensation (Bharath Seshadri)
SU-8 UV penetration (McCallum, Jason)
AZ4620 photoresist (save74@iname.com)