durusmail
:
mems-talk
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Smooth 111 surfaces in anisotropic KOH etching of Si (Christophe Roux)
Handling (scrubbing?) of BCl3 (Erik Poppe)
Metal electrodes onto thick SU-8 resist (Dekker, R. (Ronald JDSU))
Thickness uniformity of SU-8 (Dekker, R. (Ronald JDSU))
how to do alignment before wafer bonding (li shifeng)