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mems-talk
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How to uniformly etch ~0.05 - 0.3um off a 3" Si wafer? (Dave Goldstein)
How to uniformly etch ~0.05 - 0.3um off a 3" Si wafer? (Edward Sebesta)
SU-8 (micro)bubbles (Herman Walgraeve - TNW)
How to uniformly etch ~0.05 - 0.3um off a 3" Si wafer? (Andrea Mazzolari)
How to etch MgO wafer patterned by S1813 resist (jj Li)