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This is known as RIE Lag RE: XeF2 etching of Si (junjun wu)
This is known as RIE Lag RE: XeF2 etching of Si (Dirk.DeBruyker@parc.com)
Transene Nickel etchant and Silicon (Roger Shile)
This is known as RIE Lag RE: XeF2 etching of Si (Edward Sebesta)