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mems-talk
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SOI wafers, Burried OXide (BOX) layer, and after release issues (jian zi)
Curing of PDMS (DEBASHIS MAJI)
Selectivity of etching LTO over sputtered silicon nitride using BHF/BOE (Chris P. Park)
Curing of PDMS (Gareth Jenkins)
Curing of PDMS (Roger Shile)
Could anyone recommend NEGATIVE photoresist withstanding BOE? (Wang, Yu)
Could anyone recommend NEGATIVE photoresist withstanding BOE? (Joseph Grogan)
Gold etching with Ni on top (Ismail Erkin Gonenli)
Gold etching with Ni on top (Kirt Williams)