Hello all, I would like to know if there is a standard RIE recipe to etch Si3N4 selectively over Si and the etch rate of the process and the selectivity. Thanks in advance, Srinivas Parimi Research Assistant Center for Microelectronic Sensors and MEMS (CMSM) 372 ERC University of Cincinnati Cincinnati OH 45221 (513) 556 4795 sparimi@ececs.uc.edu