Hi Srinivas You can go to websites of other universities to find out a typical recipe for SI3N4. You can try out Berkeley's Si3N4 etch using LAM Auto etcher. argon.eecs.berkeley.edu Phil Tabada >From: "Srinivas Parimi">Reply-To: General MEMS discussion >To: >Subject: [mems-talk] RIE of Si3N4 >Date: Sun, 22 Jun 2003 22:32:43 -0500 > >Hello all, > >I would like to know if there is a standard RIE recipe to etch Si3N4 >selectively over Si and the etch rate of the process and the >selectivity. > > >Thanks in advance, > >Srinivas Parimi >Research Assistant >Center for Microelectronic Sensors and MEMS (CMSM) >372 ERC >University of Cincinnati >Cincinnati OH 45221 >(513) 556 4795 >sparimi@ececs.uc.edu > > > >_______________________________________________ >MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list >options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk >Hosted by the MEMS Exchange, providers of MEMS processing services. >Visit us at http://www.memsnet.org/ _________________________________________________________________ Add photos to your messages with MSN 8. Get 2 months FREE*. http://join.msn.com/?page=features/featuredemail