I have used Sulfuric Acid+H2O2 heat up to 100C for 5 min for Cr mask clean. It will remove all the stuff on them. Hong Wu Semicoa -----Original Message----- From: mems-talk-bounces+hwu=semicoa.com@memsnet.org [mailto:mems-talk-bounces+hwu=semicoa.com@memsnet.org]On Behalf Of Mighty Platypus Sent: Thursday, July 31, 2003 11:34 AM To: General MEMS discussion Subject: Re: [mems-talk] Mask Clean With a chrome or iron oxide mask, I use Acetone-Methanol-DI Water-Dry Nitrogen to clean. Persistent spots can usually be scrubbed (carefully!) with a clean-room swab or a poly-vinyl-alcohol sponge. If your mask is emulsion, you might be able to clean it with methanol. Try to find an area that you can test on, like the corner of a dark-field mask or the label of a light-field mask. Jesse Fowler UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV Los Angeles, CA 90095-1597 | (310)825-3977 "Observations of nature, no matter how seemingly arcane, are like peeling off one more layer from the great onion of knowledge" -- Don Petit, ISS science officer On Thu, 31 Jul 2003, Lin, Yaojian wrote: > Hello Friends, > > I am looking for the methods to clean the dirty mask, which may have some > polymer spots. > > Could you please give me some clue? > > With many thanks, > > Yaojian Lin > > > > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/ > _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/