durusmail: mems-talk: Mask Clean
Mask Clean
2003-07-31
2003-07-31
2003-08-04
2003-08-01
Silicic acid for TMAH etch
2003-08-03
Mask Clean
anupama@ee.washington.edu
2003-07-31
Hi all

does anyone have experience cleaning mylar masks?

thanks
anupama

> With a chrome or iron oxide mask, I use
> Acetone-Methanol-DI Water-Dry Nitrogen to clean.
> Persistent spots can usually be scrubbed (carefully!) with
> a clean-room swab or a poly-vinyl-alcohol sponge.
>
> If your mask is emulsion, you might be able to clean it
> with methanol. Try to find an area that you can test on,
> like the corner of a dark-field mask or the label of a
> light-field mask.
>
> Jesse Fowler
>   UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
>   Los Angeles, CA 90095-1597 | (310)825-3977
> "Observations of nature, no matter how seemingly arcane,
> are like peeling off one more layer from the great onion
> of knowledge"
>     -- Don Petit, ISS science officer
>
> On Thu, 31 Jul 2003, Lin, Yaojian wrote:
>
> > Hello Friends,
> >
> > I am looking for the methods to clean the dirty mask,
> > which may have some polymer spots.
> >
> > Could you please give me some clue?
> >
> > With many thanks,
> >
> > Yaojian Lin
> >
> >
> >
> >
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>
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