durusmail: mems-talk: coating on Silicon Nitride to deposit Gold
coating on Silicon Nitride to deposit Gold
coating on Silicon Nitride to deposit Gold
Nikhil Mehta
2003-08-24
hi:
We at present are do a titanium coating on Silicon Nitride on which we deposit
Gold (as gold does not stick to Nitride). I am looking for literature to find if
we can replace titanium with any other material on which we can deposit Gold and
at the same time this material is not sensitive to KOH etching (Titanium is
sensitive to KOH etching).

I tried to find some literature on this but no success. Can any one help me in
my dilemma

thanks

Nick
Graduate Student
Auburn University



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