Nick, The simplest way to deposit Gold in your case is as follows: 1. Sputtering of Ni/V7% (very often used target) on Silicon Nitride. 2. Plating of Electroless Ni (mid or high phosphor, for example from ENTHONE company). 3. Plating of immersion or electroless Gold (also from ENTHONE or Akuno). All these metal layers are not sensitive to KOH. Also, you can perform lithography of Ni/V7% using AZ resist and TRANSENE etchant -----Original Message----- From: mems-talk-bounces+davido=shellcase.com@memsnet.org [mailto:mems-talk-bounces+davido=shellcase.com@memsnet.org]On Behalf Of Nikhil Mehta Sent: Sunday, August 24, 2003 10:30 PM To: mems-talk@memsnet.org Subject: [mems-talk] coating on Silicon Nitride to deposit Gold hi: We at present are do a titanium coating on Silicon Nitride on which we deposit Gold (as gold does not stick to Nitride). I am looking for literature to find if we can replace titanium with any other material on which we can deposit Gold and at the same time this material is not sensitive to KOH etching (Titanium is sensitive to KOH etching). I tried to find some literature on this but no success. Can any one help me in my dilemma thanks Nick Graduate Student Auburn University --------------------------------- Do you Yahoo!? Yahoo! SiteBuilder - Free, easy-to-use web site design software _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/