Does anyone have a recommendation for a conformal layer of PMMA? I have 8 micron steps that have been difficult to cover. I have succeeded with a bilayer of PMMA, each layer being 1.6 microns, for a total of 3.2 microns. At that thickness, though, ebeam lithography becomes very difficult. Thanks, Randy Grow Ph.D. Candidate Dept. of Applied Physics Stanford University