Randy, The spay coating process mentioned previously (ultrasonic, by EVG, rather than electro-spray) has been used to successfully conformally coat with PMMA. Other than that, I'm not sure as to an effective method to produce the thin film you are looking for in a conformal coat. Best Regards, Chad Brubaker EV Group invent * innovate * implement Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail: C.Brubaker@EVGroup.com, www.EVGroup.com This message and any attachments contain confidential or privileged information, which is intended for the named addressee(s) only. If you have received it in error, please notify the sender immediately and then delete this e-mail. Please note that unauthorized review, copying, disclosing, distributing or otherwise making use of the information is strictly prohibited. -----Original Message----- From: Randy Grow [mailto:rgrow@stanford.edu] Sent: Tuesday, August 26, 2003 8:41 AM To: mems-talk@memsnet.org Subject: Re: [mems-talk] Electrodes in Microchannel Does anyone have a recommendation for a conformal layer of PMMA? I have 8 micron steps that have been difficult to cover. I have succeeded with a bilayer of PMMA, each layer being 1.6 microns, for a total of 3.2 microns. At that thickness, though, ebeam lithography becomes very difficult. Thanks, Randy Grow Ph.D. Candidate Dept. of Applied Physics Stanford University _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/