If you need an anisotropic etching, RIE could be an answer. Quartz can be etched such as oxide. Byungki Kim -----Original Message----- From: Daniel Dias [mailto:daniel.dias@physik.tu-darmstadt.de] Sent: Monday, September 08, 2003 6:06 AM To: mems-talk@memsnet.org Subject: [mems-talk] HF/NH4F etching of diffractive optical elements Hello, I am coming from the fields of diffractive optics and I have the following questions: I would like to etch microstructures into a fused silica substrate with a wet chemical etch process. I have heard that HF/NH4F is appropriate to do that. The structures have lateral feature sizes of 1-10 microns. The elements should be etched approximately 1-2 micron deep. Has anyone made experience with similar processes and even fabricated diffractive optical elements in quarz glas? For an answer I would be grateful. Thanks in advance Daniel _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/