Hi Ken,

Process flow design is indeed one of the missing parts of existing
MEMS-software. IC-software is used at some places, but this software is
expensive and not flexible enough for typical MEMS-applications.
Frequently a home-made documentation system is used with its "iceberg
model" (hidden) cost structure. At COMS2003 we described this problem in
the article: "Trends in Micro- and Nano software", which you can find at
http://www.phoenixbv.com/news.php?action=500&newsID=116.

PhoeniX has developed a product called "ProcessFlowDB" that enables
users to interactively design a process flow based on their own
equipment.
Some keywords: multiple users, web-based interface, flexible, user
defined abstraction levels, design checking, version control. An
Application Note for the use of the software can be found at
http://www.phoenixbv.com/news.php?action=500&newsID=111

A second product "OperatorDB" enables you to take the process flow into
your clean room, gather data on your actions, feed it back into your
design, do statistical process control, etc.

If you like more information, please visit us at
http://www.phoenixbv.com

Regards,
Niels Olij
PhoeniX B.V.


On Sun, 2003-09-21 at 04:45, Ken Westra wrote:
> MEMS Folk,
>
>    I was wondering if there were any resources (Papers, books, FAQs,
> course outline, etc) for teaching new users how to develop process flows
> to make MEMS or similar devices. I operate an academic fab and we
> constantly have to train people on how to develop the process flow to
> make their device. What I mean by this is not teaching the individual
> process steps, but how to put them together to make a device and
> actually have the process work. There does not seem to be anything 'out
> there' on how to do this. I would like to give the grad students a wider
> view than my experience.
>
> Also, are there any project management techniques out there that have
> been developed for microfabrication? Best methods developed by the
> microelectronics fabrication business?
>
> Any suggestions or comments are very welcome. Please email me directly,
> I do not monitor this email group that often (Sorry, but administration,
> keeping the equipment running and teaching take all my time).
>
>    Ken Westra
>    NanoFab Director
>    U of Alberta
>