Hello Ken,

        Have you tried the CMC "MEMS Design Flow & Device Level Modeling"?  It
is a report edited by CMC with the purpose of helping new graduate
students with the MEMS design flow, making use of the software
supported by CMC.  You can find this report at www.cmc.ca. I'm sure U
of Alberta is a member of CMC, which means you would have free access
to this material.

        Other than that, you can try Dr. Pisano's website at UC Berkeley.  He
has most of his teaching material on the web. (www.me.berkeley.edu)

        I hope this will help.

        - Isabelle


*********************************************************
Isabelle P. F. Harouche
Graduate Student
Electrical & Computer Engineering

University of Manitoba
Room 504 Engineering Bldg.
Winnipeg, MB
R3T 5V6 Canada

e-mail: harouche@ieee.org
*********************************************************
On Saturday, September 20, 2003, at 09:45 PM, Ken Westra wrote:

> MEMS Folk,
>
>    I was wondering if there were any resources (Papers, books, FAQs,
> course outline, etc) for teaching new users how to develop process
> flows
> to make MEMS or similar devices. I operate an academic fab and we
> constantly have to train people on how to develop the process flow to
> make their device. What I mean by this is not teaching the individual
> process steps, but how to put them together to make a device and
> actually have the process work. There does not seem to be anything 'out
> there' on how to do this. I would like to give the grad students a
> wider
> view than my experience.
>
> Also, are there any project management techniques out there that have
> been developed for microfabrication? Best methods developed by the
> microelectronics fabrication business?
>
> Any suggestions or comments are very welcome. Please email me directly,
> I do not monitor this email group that often (Sorry, but
> administration,
> keeping the equipment running and teaching take all my time).
>
>    Ken Westra
>    NanoFab Director
>    U of Alberta
>
>
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>