Dear all;

I want to make a mold as followed.
(please open following homepage address. There will be a picture.)

http://my.dreamwiz.com/kotai75/picture/Etching.JPG

The substrate is (100) Silicon wafer and Oxide will be used as a mask.

1. Oxide deposition.
2. Wet Etching (TMAH)  for pyramid tip (111)
3. Deep RIE Etching.

So, I want to know these following process can make a mold like that?
or Should I take another process ?

I always thanks all of you for kind answer.

Choe,SeongHun
choe@mems.mech.tohoku.ac.jp