Dear Maryla, We build megasonic single wafer cleaners. Please check our web page or give me a call. B. Kuyel, Ph.D. Nano-Master Inc. Nanomaster.com, 512 385 4552 -----Original Message----- From: mems-talk-bounces+main=nanomaster.com@memsnet.org [mailto:mems-talk-bounces+main=nanomaster.com@memsnet.org] On Behalf Of maryla krolikowska Sent: Monday, October 13, 2003 2:28 AM To: General MEMS discussion Subject: [mems-talk] Wafer cleaning Hi I need to recycle Si wafers with 2.5 micron SiO2 layer and wafers with LPCVD SiN layer I would appreciate any advice on a safe cleaning process for both SiO2 as well as for LPCVD SiN. Thank you in advance maryla _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/