durusmail: mems-talk: Edge rounding or edge cutting
Edge rounding or edge cutting
Edge rounding or edge cutting
Kenneth Smith
2003-10-17
There are a couple of methods for reducing diameter- most common is
laser cut down with edge rounding afterwards, which we can supply
services for to you.
There is also a method using a water jet that eliminates the need to do
the edge rounding and is less stressful to the silicon.
There are limitations and potential yields losses on the material using
either method- but this really depends on the product and your
specification.

If you are planning to set up an operation to perform this in your
facility a laser cut machine and an edge grinder would be the minimum
that is needed- but you should also have etch and cleaning capability
depending on your products. There are a few excess laser machines here
in the US that were for sale and Edge grinders are available from a
number of used equipment suppliers.
You will likely find it is lower cost and less hassle to have a
subcontractor perform that work than set up and maintain to equipment
and process unless you are planning very high volumes.

Please feel to contact me should you have any further questions or need
further information on this. I have a local Germany contact as well.


Best Regards,
Ken Smith

MIchaela Wullinger wrote:
> hi all,
>
> is there any experiences with edge rouding or reducing the size of the
> wafer?
> I couldn't find the tool supplieres in the internet.
>
>
> Best regards
> Michaela Wullinger
>
>
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High Purity Float Zone and Specialty CZ Silicon  for Power, IR and
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