J. Micromech. Microeng. 6 (1996) 320-329  Comb-drive actuators for large
displacements, R Legtenberg et al

Has some good information.

--
Shane McColman
Research Professional
NanoFab, University of Alberta
W 1-028 ECERF Building
Edmonton AB, Canada, T6G 2V4


On March 2, 2004 09:57 am, sapple@t2.technion.ac.il wrote:
> Hello!
>
> I'm interested in measuring the capacitance of comb-drive actuator in high
> frequency - at least 100KHz, for control circuit for micromirror.
> Do you happen to know about such product?
>
> thanks from advance.
>
> Liad Apfelbaum
>
>
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