durusmail: mems-talk: High frequency capacitance readout
High frequency capacitance readout
Rayleigh damping - Si
2004-03-09
High frequency capacitance readout
sapple@t2.technion.ac.il
2004-03-09
Hello!

I'm interested in measuring the capacitance of comb-drive actuator in high
frequency - at least 100KHz, for control circuit for micromirror.
Do you happen to know about such product?

thanks from advance.

Liad Apfelbaum

sapple@t2.technion.ac.il





reply