durusmail: mems-talk: Polyimide vs HF
Polyimide vs HF
2004-03-08
2004-03-09
Polyimide vs HF
li Yu
2004-03-08
Dear All:
I plan to coat Cr and Au on silicon and than put it in conc.HF for 30min, now I
find some problem. now I plan to coat layer of polyimide on Au before HF as a
protecting layer
1. the adhension of polyimide to Au is good enough?
2. if the polymide is fully cured, can I  get  rid of it by oxygen plasm?
Thanks in advance!
Lili



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