The cured polyimide can be removed by oxygen plasma. We do so to use the
testing wafer repeatedly.  But the wafer will become dirty after being
tested for more times.

cyh

----- Original Message -----
From: "li Yu" 
To: 
Sent: Monday, March 08, 2004 11:47 AM
Subject: [mems-talk] Polyimide vs HF


> Dear All:
> I plan to coat Cr and Au on silicon and than put it in conc.HF for 30min,
now I find some problem. now I plan to coat layer of polyimide on Au before
HF as a protecting layer
> 1. the adhension of polyimide to Au is good enough?
> 2. if the polymide is fully cured, can I  get  rid of it by oxygen plasm?
> Thanks in advance!
> Lili
>
>
>
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