Dear MEMS-Talk manager,

I would like to seek opinions from other MEMS people by posting this on
MEMS-talk. Would you please post this for me? I appreciate your help in
advance.


============================================================================
Hi, MEMS-Talk members.

I am Yonduck Sung, a master student at CMU, who is trying to make very thin
microchannels (width 5um, height 1um) with PDMS. To make these small channels,
I am going to use etched oxide layer as a mold; 1 um oxide layer on Si
substrate was patterened and etched for this purpose, on which PDMS will be
poured to form microchannels.

However, as channel dimension is so small, I am afraid of deformation or
destruction of these PDMS microchannels when stripping them off from the mold.
So I want to hear from you to get some advice about ways to peel off PDMS more
easily from the mold. Any answer will be greatly appreciated.

Then have a nice day. I thank you in advance.


Thanks,
Yonduck Sung

Graduate student
Carnegie Mellon Mechanical Engineering
5000 Forbes Av, HH B120
Pittsburgh, PA 15213

Phone : 412-268-2514
Email : ysung@andrew.cmu.edu


=============================================================================

Thanks,
Yonduck Sung

Graduate student
Carnegie Mellon Mechanical Engineering
5000 Forbes Av, HH B120
Pittsburgh, PA 15213

Phone : 412-268-2514
Email : ysung@andrew.cmu.edu


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