>Hi, MEMS-Talk members. > >I am Yonduck Sung, a master student at CMU, who is trying to make very thin >microchannels (width 5um, height 1um) with PDMS. To make these small >channels, >I am going to use etched oxide layer as a mold; 1 um oxide layer on Si >substrate was patterened and etched for this purpose, on which PDMS will be >poured to form microchannels. > >However, as channel dimension is so small, I am afraid of deformation or >destruction of these PDMS microchannels when stripping them off from the >mold. >So I want to hear from you to get some advice about ways to peel off PDMS >more >easily from the mold. Any answer will be greatly appreciated. > >Then have a nice day. I thank you in advance. > > >Thanks, >Yonduck Sung > >Graduate student >Carnegie Mellon Mechanical Engineering >5000 Forbes Av, HH B120 >Pittsburgh, PA 15213 > >Phone : 412-268-2514 >Email : ysung@andrew.cmu.edu > Hi Yonduck You can use the STS to deposit a teflon like layer to help you peel PDMS off the substrate. Usually a two minute run of only passivation gases using the standard recipe should be sufficient for your needs. The layer should last you for about 5-10 runs before you need to remove the layer and redeposit the coat. You also need to recondition the STS chamber after you run this process. Phil Tabada _________________________________________________________________ MSN Toolbar provides one-click access to Hotmail from any Web page FREE download! http://clk.atdmt.com/AVE/go/onm00200413ave/direct/01/