Hi everybody, We recently purchased an aluminium target for the companys rather old Leybold- Heraeus (model Z 400 I think) sputtering system. The problem is I can´t find working sputtering parameters for it. Either there is no aluminium coating on the test wafer at all or then the coating is of very dark colour. The process looks OK when I look through the small windows on the chamber walls. I´ve tried varying sputtering pressure and voltage. Any ideas or suggestions would be greatly appreciated. Best regards Tomi Meilahti Metorex International Oy Nihtisillankuja 5 02631 Espoo Puh: 09 32941316 Fax: 09 32941301 E-mail: tomi.meilahti@metorex.fi