Hi Tomi, I am wondering what kind of base pressure you have in the system. One of the possible reasons for dark color is non-stochiometric Aluminum oxide/nitride. Other than that Aluminum sputtering should be straight forward. If you need any further information please let me know. I hope this helps. Thanks Ravi Hionix, Inc. www.hionix.com -----Original Message----- From: Tomi Meilahti [mailto:tomi.meilahti@metorex.fi] Sent: Monday, April 05, 2004 5:33 AM To: mems-talk@memsnet.org Subject: [mems-talk] Problem with aluminium sputtering Hi everybody, We recently purchased an aluminium target for the companys rather old Leybold-Heraeus (model Z 400 I think) sputtering system. The problem is I can´t find working sputtering parameters for it. Either there is no aluminium coating on the test wafer at all or then the coating is of very dark colour. The process looks OK when I look through the small windows on the chamber walls. I´ve tried varying sputtering pressure and voltage. Any ideas or suggestions would be greatly appreciated. Best regards Tomi Meilahti Metorex International Oy Nihtisillankuja 5 02631 Espoo Puh: 09 32941316 Fax: 09 32941301 E-mail: tomi.meilahti@metorex.fi --- Incoming mail is certified Virus Free. Checked by AVG anti-virus system (http://www.grisoft.com). Version: 6.0.614 / Virus Database: 393 - Release Date: 3/5/2004 --- Outgoing mail is certified Virus Free. Checked by AVG anti-virus system (http://www.grisoft.com). Version: 6.0.614 / Virus Database: 393 - Release Date: 3/5/2004