durusmail: mems-talk: Stress in thin film
Stress in thin film
2004-06-17
2004-06-18
Stress in thin film
mahdi bagheri
2004-06-18
Hi,
(2) Compressive stresses cause buckling and yielding,
so it is very important to know which of them occurs
sooner.

Mahdi Bagheri

--- "Tan, Chuan Seng"  wrote:
> Hi all,
>
> I have questions about stress in thin film:
>
> (1) what range of stress can cause reliability
> issues in microelectronics
> thin film ? Is 500 MPa in a 0.5 um thick metal thin
> film a lot of stress to
> cause undesired failure ?
> (2) does compressive stress cause yielding like
> tensile stress does ?
>
> Thanks !!!
>
> Chuan Seng
>
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