durusmail: mems-talk: Residue remover of RIE polyimide on Al metallization
Residue remover of RIE polyimide on Al metallization
2004-05-25
2004-06-20
Electrophoretic deposition
2004-06-21
Residue remover of RIE polyimide on Al metallization
David Ovrokzky
2004-06-20
Hello,
Is anybody familiar with electrophoretic deposition of ceramics on silicon?
After long literature searching I have found an only an information on EPD
of ceramics on metals (most on Al)?

Or EPD of organic insulators, but it has to have a properties of sandwich
constituent material.
I have only experience with Eagle2100 resist, but it is unstable in acids
and solvents.

Thanks
David



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