durusmail: mems-talk: anodic bonding with nitride on silicon wafer
anodic bonding with nitride on silicon wafer
2004-06-25
2004-06-25
PZT 52/48
2004-06-27
2004-06-25
2004-06-25
anodic bonding with nitride on silicon wafer
Rahul Agarwal
2004-06-25
Hello everyone,
I wanted to know if any of you has any experience in doing anodic bonding
of
a n-type wafer with 1000A thick nitride (LPCVD), to a pyrex glass
wafer. All the suggestions will be highly appreciated.
Thanks
Rahul agarwal



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