durusmail: mems-talk: anodic bonding with nitride on silicon wafer
anodic bonding with nitride on silicon wafer
2004-06-25
2004-06-25
PZT 52/48
2004-06-27
2004-06-25
2004-06-25
anodic bonding with nitride on silicon wafer
Jason Viotty
2004-06-25
This should not be a problem. We've do this sometimes as well (with p-type
wafers), often with somewhat thicker nitride. Only difference that we've
seen is that you often need a somewhat higher bond-voltage and/or a longer
bondtime, but I don't think this should be a problem in your case.
Good luck.

Jason

___________________________________________________________
Jason Viotty
Senior Process Engineer
C2V
http://www.c2v.nl

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