durusmail: mems-talk: Problem on galss to PDMS bonding
Problem on galss to PDMS bonding
2004-07-01
2004-07-02
Problem on galss to PDMS bonding
Yun Xi
2004-07-01
Hello,

We tried to work on 25mmX35mm small size glass plate to PDMS bonding, bonding
result is very good at wide range of O2 plasma process. Now we have to bond
66mmX34mm glass chip with microchannel to PDMS, but always got unsatisfied
result by using same process as small size, somewhere bonding very well, you
can't completely remove PDMS by a blade, but somewhere you cne strip PDMS by
your hand.

If you have the same experience, please guide us to right way. Thank you very
much!

Yun

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