Hello!
  I am doing some fabrication on the microfluidic chamber by PDMS. When I
try to inject the fluid into the chamber, using syringe pump, I always
found some air bubbles trapped inside the channel.
  Does any of you have the experience of handling this case? I tried to tap
the PDMS to get rid of them, but it worked not well.
  Thank you.

  Sincerely,
  Jian



>From: "Glenn Silveira" 
>Reply-To: General MEMS discussion 
>To: "General MEMS discussion" 
>Subject: RE: [mems-talk] Trouble on CCL4
>Date: Thu, 1 Jul 2004 10:46:44 -0700
>
>Yun,
>
>I do not know the vapor pressure of CCl4 but I assume it is low. If you do
>not have enough head pressure in your cylinder the gas will not flow. One
>way to overcome this problem is to heat your cylinder. The only problem
with
>this method is the gas lines also have to be heated and to a temperature
>higher than the cylinder or the gas will condense back into a liquid. If
you
>can flow the CCl4 without the CF4 you may try to turn down the CF4 flow
and
>or pressure. If the CF4 and the CCl4 are on the same low-pressure manifold
>the CF4 can starve off the CCl4
>
>Best regards,
>
>Glenn Silveira
>
>-----Original Message-----
>From: Yun Xi [mailto:xi@ENGR.UARK.EDU]
>Sent: Wednesday, June 30, 2004 7:31 PM
>To: mems-talk@memsnet.org
>Subject: [mems-talk] Trouble on CCL4
>
>
>Hello,
>
>We used mixture of CCL4 and CF4 to do gold dry etch, but recently it
doesn't
>work. It seems CCL4 run out. We contacted Scott Specialty Gases to order
>CCL4. The company told us their cylinder will not have a diptube or
pressure
>pad and we have to invert the cylinder to reomve the product. We know that
>means CCL4 is liquid phase in cylinder. When we took our old CCL4 cylinder
>out from system, we found there is stiil liquid inside. We let the
cylinder
>upside down and connectd to system again, liquid CCL4 come out and MFC out
>of control.
>
>We would like to know how to deal with this situation to have gas phase
>CCL4? We are appreciated your help.
>
>Yun
>
>
>
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