durusmail: mems-talk: KOH wafer edge protection for long etches
KOH wafer edge protection for long etches
2004-07-18
2004-07-19
KOH wafer edge protection for long etches
arthur beyder
2004-07-18
I would like to protect the edges of my wafers during long KOH etches
(8-10hrs, 500um deep).  I am etching my wafers on both sides, thus I
can't spin on protective layers (such as ProTec or BPR100).  Does anyone
know whether I can paint these on and then bake the wafers to cure?  Are
there any other approaches for KOH protection?

Thank you,
Arthur Beyder



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