Hey there,

I have a 2µm thick layer of structured Aluminum on top of a Si-wafer. On
top of the Aluminum there is about 20-30nm of Titanium.

1. Does anyone know how to (chemically?) remove the Titanium without
chaning the size of the Aluminium structures within less than 1µm?
2. I read that the conductivity of sputtered Aluminum can be enhanced by
tempering it. Does anyone know some figures how much the conductivity
changes?

Bes regards,

Stephan